Description

Remspec Corporation of Charlton City, MA, has launched a new IRRAS (infrared reflectance-absorbance spectroscopy) system for in situ reaction monitoring inside CVD reactors in the semiconductor industry. The method is sensitive enough to detect molecular species and intermediates at the monolayer level on the surface of a wafer and can collect data continuously, at predetermined intervals, throughout a deposition cycle. The FTIR signal is transferred to the reactor through a mid-IR transmitting optical fiber cable connected to a standard conflat flange. A high-sensitivity MCT detector is mounted at an opposing port. Parabolic mirrors collimate the signal and direct it onto the substrate and from there onto the detector. Barium fluoride windows maintain reactor vacuum while transmitting the IR signal. A robust FTIR unit controlled by Remspec's VizIR software provides an easy-to-use interface to a set of sophisticated tools for collecting and analyzing reaction data. For more information: Remspec Corporation, Charlton City, MA ,Phone: 508-556-3211, www.remspec.com, info@remspec.com